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US Patent 11971370 Inspection apparatus and inspection method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
July 11, 2023
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Date of Patent
April 30, 2024
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Patent Application Number
18350255
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Patent Citations
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US Patent 10895541 Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy
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US Patent 11467107 X-ray analysis apparatus and x-ray generation unit
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US Patent 6850598 X-ray anode and process for its manufacture
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US Patent 7221731 X-ray microscopic inspection apparatus
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US Patent 7916834 Small spot X-ray fluorescence (XRF) analyzer
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US Patent 8644450 X-ray fluorescence spectrometer and X-ray fluorescence analyzing method
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US Patent 9213007 Foreign matter detector
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US Patent 10269536 Electron microscope
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US Patent 10514345 X-ray thin film inspection device
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Patent Inventor Names
Takeo Tsukamoto
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11971370
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Patent Primary Examiner
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Thomas R Artman
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