Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kevin Griffin0
Muhannad Mustafa0
Mario D. Silvetti0
Date of Patent
May 7, 2024
0Patent Application Number
174070860
Date Filed
August 19, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
Pedestal assemblies, purge rings for pedestal assemblies, and processing methods for increasing residence time of an edge purge gas in heated pedestal assemblies are described. Purge rings have an inner diameter face and an outer diameter face defining a thickness of the purge ring, a top surface and a bottom surface defining a height of the purge ring, and a thermal expansion feature. Purge rings comprise a plurality of apertures extending through the thickness and aligned circumferentially with a plurality of circumferentially spaced purge outlets in a substrate support.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.