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US Patent 11978651 Substrate transport apparatus

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
March 15, 2022
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Date of Patent
May 7, 2024
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Patent Application Number
17654852
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Patent Citations
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US Patent 10748799 Substrate transport apparatus with interchangeable motor modules
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US Patent 11276598 Substrate transport apparatus
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US Patent 7736118 Transfer apparatus
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US Patent 8008884 Substrate processing apparatus with motors integral to chamber walls
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US Patent 9742250 Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
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US Patent 9751209 Compact direct drive spindle
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US Patent 9948155 Sealed robot drive
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US Patent 10468936 Sealed robot drive
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US Patent 10493620 Compact direct drive spindle
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Patent Inventor Names
Robert T. Caveney
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11978651
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Patent Primary Examiner
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Gerald McClain
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CPC Code
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B25J 9/042
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