Patent attributes
An integrated optical transducer for measuring displacement of a diaphragm comprises the diaphragm, a lens element and a substrate body having a waveguide structure and a coupling element. The diaphragm is arranged distant from the substrate body and substantially parallel to a main extension plane of the substrate body. The waveguide structure is configured to guide light from a light source to the coupling element and from the coupling element to a photodetector. The coupling element is configured to couple at least part of the light in the waveguide structure onto a light path between the coupling element and the diaphragm and to couple light reflected by a surface of the diaphragm from the light path into the waveguide structure. The lens element is arranged on the light path such that light on the light path passes through the lens element.
