Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takaaki Kikuchi0
Takashi Taira0
Date of Patent
May 14, 2024
0Patent Application Number
169419760
Date Filed
July 29, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
An edge ring includes a first edge ring, and a second edge ring that has a side surface adjacent to a side surface of the first edge ring and is movable in a vertical direction along the side surface of the first edge ring. Further, the side surface of the first edge ring and the side surface of the second edge ring at least partially face each other in a movement range of the second edge ring.
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