Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Feng-Cheng Yang0
Chung-Te Lin0
Meng-Han Lin0
Sheng-Chen Wang0
Han-Jong Chia0
Date of Patent
May 14, 2024
0Patent Application Number
178749080
Date Filed
July 27, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A semiconductor device and method of manufacture are provided. In embodiments a memory array is formed by manufacturing portions of a word line during different and separate processes, thereby allowing the portions formed first to act as a structural support during later processes that would otherwise cause undesired damage to the structures.
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