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US Patent 11990321 Fast response pedestal assembly for selective preclean

Patent 11990321 was granted and assigned to Applied Materials on May, 2024 by the United States Patent and Trademark Office.

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Patent abstract

Implementations of the present disclosure generally relate to an improved substrate support pedestal assembly. In one implementation, the substrate support pedestal assembly includes a shaft. The substrate support pedestal assembly further includes a substrate support pedestal, mechanically coupled to the shaft. The substrate support pedestal comprises substrate support plate coated on a top surface with a ceramic material.

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