US Patent 11993512 Dual micro-electro mechanical system and manufacturing method thereof
Patent 11993512 was granted and assigned to Taiwan Semiconductor Manufacturing Company on May, 2024 by the United States Patent and Trademark Office.
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US Patent 11993512 Dual micro-electro mechanical system and manufacturing method thereof
Article
Patent abstract
A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chen-Hua Lin0
Chwen-Ming Liu0
Huang-Wen Tseng0
Victor Chiang Liang0
Yang-Che Chen0
Yi-Chuan Teng0
Date of Patent
May 28, 2024
0Patent Application Number
176942960
Date Filed
March 14, 2022
0Patent Citations
Patent Primary Examiner
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