Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David A. Reed0
Bruno W. Schueler0
Bruce H. Newcome0
Date of Patent
May 28, 2024
0Patent Application Number
177549980
Date Filed
October 22, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.
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