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US Patent 11996480 Vertical transistor with late source/drain epitaxy
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Patent
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Date Filed
September 9, 2021
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Date of Patent
May 28, 2024
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Patent Application Number
17470686
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Patent Citations
US Patent 9190417 Fin-like field effect transistor (FinFET) device and method of manufacturing same
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US Patent 9685381 Integrating VLSI-compatible fin structures with selective epitaxial growth and fabricating devices thereon
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US Patent 9728466 Vertical field effect transistors with metallic source/drain regions
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US Patent 9773913 Vertical field effect transistor with wrap around metallic bottom contact to improve contact resistance
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US Patent 10217846 Vertical field effect transistor formation with critical dimension control
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US Patent 10396208 Vertical transistors with improved top source/drain junctions
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US Patent 10461173 Methods, apparatus, and manufacturing system for forming source and drain regions in a vertical field effect transistor
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US Patent 10453940 Vertical field effect transistor with strained channel region extension
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US Patent 10727339 Selectively regrown top contact for vertical semiconductor devices
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US Patent 8759844 Semiconductor device having elevated source and drain
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•••
Patent Inventor Names
Juntao Li
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Choonghyun Lee
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Shogo Mochizuki
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Kangguo Cheng
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11996480
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Patent Primary Examiner
Mohammad M Hoque
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CPC Code
H01L 29/165
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H01L 29/401
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H01L 29/41741
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H01L 29/7827
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H01L 29/0847
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H01L 29/66666
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