US Patent 12002692 Operation method of vacuum processing device
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US Patent 12002692 Operation method of vacuum processing device
Article
Patent abstract
According to one embodiment, a vacuum processing device is provided which is capable of being controlled to create the most suitable gas flow under the situation where the device is placed by allowing a plurality of vacuum transfer chambers to communicate with each other via the intermediate chamber in an operation method of the vacuum processing device including the plurality of vacuum transfer chambers connected to each other via the intermediate chamber and a plurality of vacuum processing chambers respectively connected to the vacuum transfer chambers.
Infobox
Is a
Patent Jurisdiction
Patent Number
Patent Inventor Names
Keitarou Ogawa0
Ryoichi Isomura0
Takahiro Sakuragi0
Date of Patent
June 4, 2024
0Patent Application Number
175079320
Date Filed
October 22, 2021
0Patent Citations
Patent Primary Examiner
CPC Code
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