Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
ShihChieh Lin0
Date of Patent
June 11, 2024
0Patent Application Number
173850220
Date Filed
July 26, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
A temperature measurement method includes: a temperature calibrator with a first test structure of which a resistance forms a first functional relationship with a temperature is placed on a stage in a chamber; a temperature of the chamber is made to reach a set temperature; a voltage is applied to two opposite ends of the first test structure to obtain a corresponding current and a corresponding resistance; and an actual temperature of the temperature calibrator is acquired according to the resistance and the first functional relationship.
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