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US Patent 12007590 Two-dimensional diffraction grating

Overview Structured Data Issues Contributors Activity

Is a

Patent

Date Filed

January 4, 2019

Date of Patent

June 11, 2024

Patent Application Number

16965172

Patent Citations

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US Patent 7417745 Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry

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US Patent 8004691 Measuring apparatus, exposure apparatus and method, and device manufacturing method

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US Patent 10371634 Optical system and assay chip for probing, detecting and analyzing molecules

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US Patent 10349908 X-ray interferometric imaging system

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US Patent 10564348 Passive aligning optical coupler array

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US Patent 7283252 Measuring method and apparatus using interference, exposure method and apparatus using the same, and device fabrication method

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US Patent 7304749 Point diffraction interferometer and exposure apparatus and method using the same

Patent Inventor Names

Derick Yun Chek Chong

Johannes Jacobus Matheus Baselmans

Yassin Chowdhury

Pieter Cristiaan De Groot

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

12007590

Patent Primary Examiner

CPC Code

•••

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