Patent 12009237 was granted and assigned to Applied Materials on June, 2024 by the United States Patent and Trademark Office.
A method includes generating a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing. The method further includes sorting the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations. The method further includes, for each operation of the plurality of operations in the queue, obtaining a next operation in the queue and setting a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe.