Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Arie Jeffrey Den Boef0
Peter David Engblom0
Marc Johannes Noot0
Simon Gijsbert Josephus Mathijssen0
Jan-Willem Gemmink0
Timothy Dugan Davis0
Ralph Timotheus Huijgen0
Kaustuve Bhattacharyya0
...
Date of Patent
June 18, 2024
0Patent Application Number
174196480
Date Filed
December 24, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
A method provides the steps of receiving an image from a metrology tool, determining individual units of said image and discriminating the units which provide accurate metrology values. The images are obtained by measuring the metrology target at multiple wavelengths. The discrimination between the units, when these units are pixels in said image, is based on calculating a degree of similarity between said units.
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