US Patent 12014913 Reducing plasma formation in an ion pump
Patent 12014913 was granted and assigned to Edwards Vacuum on June, 2024 by the United States Patent and Trademark Office.
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US Patent 12014913 Reducing plasma formation in an ion pump
Article
Patent abstract
An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Evan Privet0
Marcus Hans Robert Thierley0
Date of Patent
June 18, 2024
0Patent Application Number
176406730
Date Filed
September 4, 2020
0Patent Citations
Patent Primary Examiner
CPC Code
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