Create
Log in
Sign up
Golden has been acquired by ComplyAdvantage.
Read about it here ⟶
US Patent 12020970 Metrology data correction
Overview
Structured Data
Issues
Contributors
Activity
Access by API
Access by API
Is a
Patent
0
Date Filed
September 22, 2021
0
Date of Patent
June 25, 2024
0
Patent Application Number
17481582
0
Patent Citations
US Patent 9620426 Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation
0
US Patent 10401738 Overlay metrology using multiple parameter configurations
0
US Patent 7663753 Apparatus and methods for detecting overlay errors using scatterometry
0
US Patent 9329033 Method for estimating and correcting misregistration target inaccuracy
0
Patent Inventor Names
Daniel Schmidt
0
Patent Jurisdiction
United States Patent and Trademark Office
0
Patent Number
12020970
0
Patent Primary Examiner
Stacy Whitmore
0
CPC Code
H01L 21/682
0
G03F 7/705
0
G03F 7/70633
0
G06F 16/583
0
Find more entities like US Patent 12020970 Metrology data correction
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Company
Home
Press & Media
Blog
Careers
WE'RE HIRING
Products
Knowledge Graph
Query Tool
Data Requests
Knowledge Storage
API
Pricing
Enterprise
ChatGPT Plugin
Legal
Terms of Service
Enterprise Terms of Service
Privacy Policy
Help
Help center
API Documentation
Contact Us
SUBSCRIBE