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US Patent 12027351 Plasma non-uniformity detection

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
January 8, 2021
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Date of Patent
July 2, 2024
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Patent Application Number
17145202
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Patent Citations
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US Patent 9852890 Frequency tuning for pulsed radio frequency plasma processing
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US Patent 10410836 Systems and methods for tuning to reduce reflected power in multiple states
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US Patent 10411769 Signal generation method and signal generation device
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US Patent 10447174 Additive synthesis of interleaved switch mode power stages for minimal delay in set point tracking
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US Patent 10469108 Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator
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US Patent 10475622 System and method for plasma ignition
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US Patent 6876155 Plasma processor apparatus and method, and antenna
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US Patent 6894245 Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
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US Patent 6949887 High frequency inductive lamp and power oscillator
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US Patent 7030335 Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
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•••
Patent Inventor Names
Stephen E. Savas
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Alexandre De Chambrier
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12027351
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Patent Primary Examiner
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Roy Y Yi
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