US Patent 12027394 Substrate processing method and substrate processing apparatus
Patent 12027394 was granted and assigned to Tokyo Electron on July, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 7, 2023
0
Date of Patent
July 2, 2024
0
Patent Applicant
Patent Application Number
18297042
0
Patent Citations
Patent Inventor Names
Kazuyoshi Shinohara
0
Hiroki Sakurai
0
Kazuki Kosai
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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