Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chi-Hung Liao0
Fei-Gwo Tsai0
Yueh Lin Yang0
Date of Patent
July 2, 2024
0Patent Application Number
157235050
Date Filed
October 3, 2017
0Patent Citations
Patent Primary Examiner
Patent abstract
A substrate support apparatus includes a housing and a plurality of spherical supports. The housing has a top surface, the top surface including a plurality of openings. The housing is configured to position the plurality of spherical supports within the plurality of openings so that topmost surfaces of the plurality of spherical supports are arranged in a plane above the top surface. A spherical support of the plurality of spherical supports is rotatable within the housing.
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