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US Patent 12027410 Edge ring arrangement with moveable edge rings

Patent 12027410 was granted and assigned to Lam Research on July, 2024 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Lam Research
Lam Research
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Date Filed
February 22, 2021
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Date of Patent
July 2, 2024
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Patent Applicant
Lam Research
Lam Research
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Patent Application Number
17181571
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Patent Citations
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US Patent 7736998 Silicon-on insulator substrate and method for manufacturing the same
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US Patent 7757541 Techniques for calibration of gas flows
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US Patent 7758698 Dual top gas feed through distributor for high density plasma chamber
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•••
Patent Inventor Names
Raphael Casaes
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Haoquan Yan
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Jon Mcchesney
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Robert Griffith O'Neill
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Alex Paterson
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12027410
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Patent Primary Examiner
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Keath T Chen
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