US Patent 12061333 Two-dimensional micro-electrical mechanical system mirror and actuation method

Described are two-dimensional scanning micromirror devices, scanning image display systems that incorporate a two-dimensional scanning micromirror device, and methods of projecting light using two-dimensional scanning micromirror devices. The disclosed two-dimensional scanning micromirror devices can be driven at or near the resonant oscillation frequency of the micromirror structure, which can result in lower power operation. In addition, by driving the micromirror structure at multiple different frequencies, the reflected light can be directed along a non-sinusoidal path, which can improve a tilt angle of the projected light compared with reflected light directed along a sinusoidal path.