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US Patent 12065730 Coating of fluid-permeable materials

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
June 5, 2020
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Date of Patent
August 20, 2024
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Patent Application Number
16894160
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Patent Citations
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US Patent 10211110 Method of manufacturing semiconductor device
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US Patent 10622196 Plasma processing apparatus
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US Patent 8945306 Gas supply device
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US Patent 8986450 Substrate processing apparatus and method of manufacturing semiconductor device
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US Patent 9206512 Gas distribution system
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US Patent 9340879 Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium
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US Patent 8163087 Plasma enhanced atomic layer deposition system and method
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US Patent 8211235 Apparatuses and methods for deposition of material on surfaces
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US Patent 8404048 Off-angled heating of the underside of a substrate using a lamp assembly
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US Patent 8425979 Maskant free diffusion coating process
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Patent Inventor Names
Marko Pudas
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12065730
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Patent Primary Examiner
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Jeffrie R. Lund
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CPC Code
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C23C 16/406
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C23C 16/45561
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C23C 16/45597
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C23C 16/455
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B05C 9/04
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B05C 7/04
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C08F 10/00
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B05C 13/00
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C23C 16/045
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C23C 16/45519
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