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US Patent 12067340 Computational wafer inspection

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
July 30, 2021
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Date of Patent
August 20, 2024
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Patent Application Number
17389682
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Patent Citations
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US Patent 7333192 Apparatus and method for inspecting defects
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US Patent 7689948 System and method for model-based scoring and yield prediction
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US Patent 8407630 Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturing
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US Patent 8755045 Detecting method for forming semiconductor device
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US Patent 8918742 Methods and systems for pattern design with tailored response to wavefront aberration
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US Patent 9355200 Method and apparatus for design of a metrology target
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US Patent 9507907 Computational wafer inspection
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US Patent 9606442 Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
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US Patent 10579772 Computational wafer inspection
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US Patent 9990462 Computational wafer inspection
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•••
Patent Inventor Names
James Benedict Kavanagh
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Johannes Catharinus Hubertus Mulkens
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Arie Jeffrey Den Boef
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Bernardo Kastrup
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Christophe David Fouquet
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Neal Patrick Callan
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James Patrick Koonmen
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12067340
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Patent Primary Examiner
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Nghia M Doan
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CPC Code
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G03F 7/70525
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G03F 7/705
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H01L 22/20
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G06F 30/398
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G06F 30/20
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G03F 7/7065
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