Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hanhong Chen0
Michael Rice0
Sanjeev Baluja0
Arkaprava Dan0
Joseph AuBuchon0
Date of Patent
September 3, 2024
0Patent Application Number
170250250
Date Filed
September 18, 2020
0Patent Primary Examiner
CPC Code
Patent abstract
Apparatus and methods to process one or more substrates are described. A plurality of process stations are arranged in a circular configuration around a rotational axis. A support assembly with a rotatable center base defining a rotational axis, at least two support arms extending from the center base and heaters on each of the support arms is positioned adjacent the processing stations so that the heaters can be moved amongst the various process stations to perform one or more process condition. The support assembly configured to offset the position of the substrate with respect to the processing stations.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.