Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sang Tae Park0
Daniel Joseph Masiel0
Ruth Shewmon Bloom0
Bryan Walter Reed0
Date of Patent
September 3, 2024
0Patent Application Number
182015360
Date Filed
May 24, 2023
0Patent Citations
Patent Primary Examiner
Patent abstract
A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.
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