Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ivan Van De Putte0
Niek Dewilde0
Wilmert De Bosscher0
Date of Patent
September 3, 2024
0Patent Application Number
176262440
Date Filed
July 14, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
A movement system is provided for moving a non-flat substrate across a sputter flux distribution without circumferentially exposing the non-flat substrate to the sputter flux distribution. The movement system is arranged for a first movement of translationally transporting the non-flat substrate along the sputter flux distribution, and a second movement of translating and/or rotating the non-flat substrate with respect to the sputter flux distribution.
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