US Patent 12083791 Liquid discharge device and imprint apparatus
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US Patent 12083791 Liquid discharge device and imprint apparatus
Article
Patent abstract
A liquid discharge device includes a container configured to contain a liquid; a discharge port which is formed by bonding a plurality of substrates and from which the liquid supplied from the container is discharged; a piezoelectric element provided in correspondence with the discharge port, and configured to generate energy for discharging the liquid from the discharge port; and a detection unit configured to detect peeling of a bonding surface between the plurality of substrates forming the discharge port.
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Patent Jurisdiction
Patent Number
Patent Inventor Names
Akiko Iimura0
Masahiro Kuri0
Noriyasu Hasegawa0
Sari Ito0
Date of Patent
September 10, 2024
0Patent Application Number
175002390
Date Filed
October 13, 2021
0Patent Citations
Patent Primary Examiner
CPC Code
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