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US Patent 12084466 Purification of trimethylsilanol
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Patent
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Date Filed
September 20, 2023
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Date of Patent
September 10, 2024
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Patent Application Number
18470776
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Patent Citations
US Patent 9480944 Process for removal of siloxanes and related compounds from gas streams
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US Patent 7709371 Repairing damage to low-k dielectric materials using silylating agents
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Patent Inventor Names
Dakota Even
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
12084466
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Patent Primary Examiner
Pancham Bakshi
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CPC Code
C07F 7/20
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C07F 7/0836
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C07F 7/0838
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