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US Patent 12084771 Control of liquid delivery in auto-refill systems

Patent 12084771 was granted and assigned to Applied Materials on September, 2024 by the United States Patent and Trademark Office.

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Patent abstract

An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the state machine having one or more states for refilling the ampoule.

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