US Patent 12085744 Superconformal recessed feature fill sol-gels

Various systems and methods relating to a feature fill sol-gel material are provided herein. The feature fill sol-gel material may form a superconformal sol-gel coating. The feature fill sol-gel material may include a first titanium precursor composed of Titanium(IV) and an inorganic ligand. The feature fill sol-gel material may be formed by dissolving or suspending the first titanium precursor in a solvent. The feature fill sol-gel material may be annealed to form the superconformal sol-gel coating. The superconformal sol-gel coating may be an optically transparent coating having an absorbance at a wavelength of 450 nm of less than 0.2% per 150 nm and a refractive index ranging from 1.65 to 2.20.