US Patent 12085968 Apparatus for controlling gas flow rates at multi-ports

Provided is a multi-port gas flow rate control apparatus. The multi-port gas flow rate control apparatus includes a gas supply chamber configured to supply a measurement gas input through one gas inflow channel while allowing the measurement gas to diverge into a plurality of flows, a plurality of gas divergence flow channels each having one side connected to the gas supply chamber and configured to transfer the measurement gas flowing through the gas supply chamber to a plurality of gas sensors, respectively, and a gas measurement chamber configured to accommodate the plurality of gas sensors, including the plurality of gas divergence flow channels configured to connect to the gas supply chamber to the plurality of gas sensors to transfer a gas outflow diverging through the gas supply chamber to the plurality of accommodated gas sensors, and configured to discharge the gas outflow sensed by the plurality of gas sensors.