Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hernan A. Castro0
Stephen W. Russell0
Stephen H. Tang0
Date of Patent
September 10, 2024
0Patent Application Number
169053630
Date Filed
June 18, 2020
0Patent Citations
...
Patent Primary Examiner
Patent abstract
Methods, systems, and devices for buried lines and related fabrication techniques are described. An electronic device (e.g., an integrated circuit) may include multiple buried lines at multiple layers of a stack. For example, a first layer of the stack may include multiple buried lines formed based on a pattern of vias formed at an upper layer of the stack. The pattern of vias may be formed in a wide variety of spatial configurations, and may allow for conductive material to be deposited at a buried target layer. In some cases, buried lines may be formed at multiple layers of the stack concurrently.
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