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US Patent 12092966 Device feature specific edge placement error (EPE)

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
November 3, 2023
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Date of Patent
September 17, 2024
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Patent Application Number
18386846
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Patent Citations
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US Patent 10409171 Overlay control with non-zero offset prediction
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US Patent 10533848 Metrology and control of overlay and edge placement errors
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US Patent 10571811 Device metrology targets and methods
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US Patent 10698321 Process compatible segmented targets and design methods
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US Patent 11698251 Methods and systems for overlay measurement based on soft X-ray Scatterometry
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US Patent 11248905 Machine learning in metrology measurements
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US Patent 11874605 Verification metrology targets and their design
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US Patent 8502979 Methods and systems for determining a critical dimension and overlay of a specimen
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US Patent 9093458 Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets
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Patent Inventor Names
Frank Laske
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Nadav Gutman
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Amnon Manassen
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Andrei V. Shchegrov
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12092966
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Patent Primary Examiner
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Hung V Nguyen
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CPC Code
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G01B 2210/56
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G01B 15/00
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G01B 11/272
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