Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takaaki Matsumoto0
Satoyuki Nomura0
Tomohiro Iwano0
Tomomi Kukita0
Tomoyasu Hasegawa0
Date of Patent
October 1, 2024
0Patent Application Number
172630890
Date Filed
September 25, 2018
0Patent Citations
Patent Primary Examiner
Patent abstract
A slurry containing abrasive grains and a liquid medium, in which the abrasive grains contain at least one metal compound selected from the group consisting of a metal oxide and a metal hydroxide, the metal compound contains a metal capable of taking a plurality of valences, and when the slurry is brought into contact with a surface to be polished to bring the abrasive grains into contact with the surface to be polished, the slurry yields 0.13 or more in X-ray photoelectron spectroscopy as a ratio of the lowest valence among the plurality of valences of the metal.
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