Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Amrita Mathuriya0
Tanay Gosavi0
Noriyuki Sato0
Debraj Guhabiswas0
Sasikanth Manipatruni0
Niloy Mukherjee0
Date of Patent
October 1, 2024
0Patent Application Number
175029420
Date Filed
October 15, 2021
0Patent Citations
...
Patent Primary Examiner
CPC Code
Patent abstract
An integration process including an etch stop layer for high density memory and logic applications and methods of fabrication are described. While various examples are described with reference to FeRAM, capacitive structures formed herein can be used for any application where a capacitor is desired. For instance, the capacitive structure can be used for fabricating ferroelectric based or paraelectric based majority gate, minority gate, and/or threshold gate.
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