Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoki Muramatsu0
Tadayoshi Hosaka0
Kunihiro Furuya0
Shigekazu Komatsu0
Junichi Hagihara0
Date of Patent
October 15, 2024
0Patent Application Number
184467240
Date Filed
August 9, 2023
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
A wafer inspection system is provided. The wafer inspection system includes: a transfer region in which a transfer device is arranged; an inspection region in which test heads for inspecting a substrate are arranged; and a maintenance region in which the test heads are maintained. The inspection region is located between the transfer region and the maintenance region, a plurality of inspection rooms accommodating the test heads are adjacent to each other in the inspection region, and the test heads are configured to be unloaded from the inspection region to the maintenance region.
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