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US Patent 12119205 Atomic layer etching by electron wavefront

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Date Filed
February 7, 2024
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Date of Patent
October 15, 2024
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Patent Application Number
18435576
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Patent Citations
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US Patent 11942306 Atomic layer etching by electron wavefront
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US Patent 11887823 Electron bias control signals for electron enhanced material processing
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US Patent 12027348 Electron bias control signals for electron enhanced material processing
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US Patent 10566212 Designer atomic layer etching
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US Patent 11869747 Atomic layer etching by electron wavefront
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Patent Inventor Names
William Andrew Goddard
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David Irwin Margolese
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Stewart Francis Sando
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Samir John Anz
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12119205
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Patent Primary Examiner
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Stephanie P Duclair
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