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US Patent 12121991 Processing apparatus, and manufacturing method of movable body

Patent 12121991 was granted and assigned to Nikon on October, 2024 by the United States Patent and Trademark Office.

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Patent abstract

A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.

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