Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xiaoling Wang0
Chuang Shan0
Date of Patent
October 22, 2024
0Patent Application Number
176577990
Date Filed
April 4, 2022
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
The present disclosure relates to the technical field of semiconductors, and provides a mask pod and a semiconductor device. The mask pod includes: a body, wherein the body has an accommodation space configured to accommodate a mask, the accommodation space has a first opening, and the first opening is located on a circumferential side of the body; and a shielding member, wherein the shielding member is provided on the body and is movably provided relative to the body, to shield or release the first opening.
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