Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Julio C. Costa0
Mickael Renault0
Date of Patent
October 29, 2024
0Patent Application Number
171029570
Date Filed
November 24, 2020
0Patent Citations
...
Patent Primary Examiner
Patent abstract
The present disclosure relates to a microelectronics package with a vertically stacked structure of a microelectromechanical systems (MEMS) device and a controller device. The MEMS device includes a MEMS component, a MEMS through-via, and a MEMS connecting layer configured to electrically connect the MEMS component with the MEMS through-via. The controller device includes a controlling component, a controller through-via, and a controller connecting layer configured to electrically connect the controlling component with the controller through-via. The controller through-via is in contact with the MEMS through-via, such that the controlling component in the controller device is configured to control the MEMS component in the MEMS device.
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