US Patent 12130465 Variable height slanted grating method
Patent 12130465 was granted and assigned to Applied Materials on October, 2024 by the United States Patent and Trademark Office.
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US Patent 12130465 Variable height slanted grating method
Article
Patent abstract
An apparatus with a grating structure and a method for forming the same are disclosed. The grating structure includes forming a recess in a grating layer. A plurality of channels is formed in the grating layer to define slanted grating structures therein. The recess and the slanted grating structures are formed using a selective etch process.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Morgan Evans0
Rutger Meyer Timmerman Thijssen0
Date of Patent
October 29, 2024
0Patent Application Number
179480620
Date Filed
September 19, 2022
0Patent Citations
Patent Primary Examiner
CPC Code
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