Patent attributes
A vibrator device has the vibrator element, a support substrate supporting the vibrator element, and a plurality of interconnections disposed on the support substrate. The support substrate includes an element mounting base, a supporting base, a frame located between the element mounting base and the supporting base, inner beams for coupling the element mounting base and the frame to each other, and outer beams for coupling the frame and the supporting base to each other. The plurality of interconnections include a drive signal interconnection and a detection signal interconnection laid around to the element mounting base and the supporting base, and the drive signal interconnection and the detection signal interconnection are laid around to the element mounting base and the frame through the respective inner beams different from each other, and are laid around to the frame and the supporting base through the respective outer beams different from each other.
