Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Reinaldo Vega0
Praneet Adusumilli0
Takashi Ando0
Cheng Chi0
Date of Patent
November 5, 2024
0Patent Application Number
174904540
Date Filed
September 30, 2021
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
A memory device is provided. The memory device includes a main feature disposed beneath a surface of a photolithographic mask. The memory device further includes at least one Sub-Resolution Assistant Feature (SRAF) proximate to the main feature beneath the surface. The main feature has an electrical conductivity based on an area relationship with the at least one SRAF.
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