US Patent 12136533 Antenna mechanism and plasma processing device

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Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

121365330

Patent Inventor Names

Yasunori Ando0

Daisuke Matsuo0

Date of Patent

November 5, 2024

Patent Application Number

177974340

Date Filed

March 10, 2020

Patent Citations

‌

US Patent 6887339 RF power supply with integrated matching network

Patent Primary Examiner

CPC Code

Patent abstract

According to the present invention, provided is an antenna mechanism

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