Patent attributes
The invention relates to a thermo-optical waveguide switch which is located on a substrate. Said switch comprises a glass layer, through which a waveguide extends. A hollow chamber which lies beneath the waveguide thermally decouples the latter from the substrate. At least two supports are located in the hollow chamber to provide mechanical stability. One production method for obtaining a thermo-optical waveguide switch consists of creating a glass layer with an arrangement of perforations on a substrate. At least one hollow chamber containing at least two supports is formed by isotropically underetching the glass layer. The hollow chamber is subsequently sealed and a waveguide is formed above said hollow chamber. Another production method first creates a waveguide in a glass layer which is formed on a substrate. The glass layer in the vicinity of the waveguide is then removed using a mask and the waveguide is at least partially underetched by an isotropic etching process, thus forming a hollow chamber containing at least two supports below the waveguide.
