Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hung Chih Chen0
Ramakrishna Cheboli0
Steven M. Zuniga0
Date of Patent
February 1, 2005
0Patent Application Number
101240660
Date Filed
April 16, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A carrier head has a backing assembly with a substrate support surface, a housing connectable to a drive shaft to rotate with the drive shaft about a rotation axis, and a dampening material in a load path between the backing assembly and the housing. The dampening material reduces transmission of vibrations from the backing assembly to the housing.
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