Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Desmond R. Lim0
Kazumi Wada0
Kevin K. Lee0
Lionel C. Kimerling0
Date of Patent
February 1, 2005
0Patent Application Number
098763920
Date Filed
June 7, 2001
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of reducing the scattering losses that involves smoothing of the core/cladding interface and/or change of waveguide geometry in high refractive index difference waveguides. As an example, the SOI-based Si/SiO2 waveguides are subjected to an oxidation reaction at high temperatures, after the waveguide patterning process. By oxidizing the rough silicon core surfaces after the patterning process, the core/cladding interfaces are smoothened, reducing the roughness scattering in waveguides.
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