US Patent 6860793 Window portion with an adjusted rate of wear
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Article (+285 characters)
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Patent abstract
A polishing pad includes a polishing layer, and the transparent window portion of the polishing layer having dispersed particles to increase the rate at which the window portion wears away during a polishing operation, and to avoid forming a lump in the polishing layer.
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Patent Inventor Names
Naoto Kubo0
William D. Budinger0
Date of Patent
March 1, 2005
0Patent Application Number
098053280
Date Filed
March 13, 2001
0Patent Primary Examiner
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US Patent 6860793 Window portion with an adjusted rate of wear
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