Is a
Patent attributes
Patent Applicant
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Charles D. Skinner0
Steven A. Foote0
Date of Patent
April 5, 2005
0Patent Application Number
106982540
Date Filed
October 31, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A mechanical resonator having an electrical charge buried and substantially permanently trapped in a layer of insulating material grown or otherwise formed on either or both of the electrode and the vibratory beam, whereby the trapped electrical charge generates electrostatic forces between the beams and the electrodes of the opposing plates of the resultant capacitor.
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